The ESIEE Paris cleanrooms are a dedicated platform for the development of micro- and nanostructures. They provide a controlled environment, certified to ISO Class 5 and ISO Class 7, and use advanced technologies to develop medical devices (including brain implants and retinal implants) and connected devices (miniaturized sensors), with applications in microelectronics, aerospace, space and pharmaceutical industries.

The platform features more than 120 pieces of equipment across 650 m² of cleanroom facilities. It supports industrial partners throughout the innovation process, from early proof-of-concept development to pre-industrialization.

Technology Platforms

• Silicon, glass and Silicon-On-Insulator (SOI)
• Flexible substrates: polyimide, PDMS, parylene, etc.
• Bulk and thin-film piezoelectric materials
• Carbon-based materials: diamond, graphene, carbon nanotubes, etc.
• Wafer Sizes
• 4-inch / 100 mm wafers as the standard size across all equipment
• 2-inch / 50 mm to 6-inch / 150 mm wafers for selected process steps, upon request
• Cleanroom Services

The cleanroom offering is based on three complementary components:

1. Equipment Access

• Rapidly test an idea
• Produce initial prototypes
• Conduct technical trials

2. Technical Support

• Help structure the project
• Provide support during experimental activities
• Adjust technical parameters
• Optimize results

3. R&D Projects

• Co-develop innovative solutions
• Participate in collaborative R&D projects
• Facilitate technology transfer