For more than 30 years, ESIEE Paris cleanrooms support you in your technological development of your microelectromechanical systems (MEMS) and other innovative miniaturised sensors, from the first prototypes to the manufacturing of preseries. Whatever the degree of maturity of your project, our team of experts will be able to provide you with the appropriate solutions with responsiveness and flexibility. This 3rd infrastructure open in 2017 gathers more than 70heavy process equipments on 650 m² in ISO 5 & 7 classes, from front-end to back-end, for initial and ongoing training, academic research and support to industry (6 industrial engineers full time on the platform). A dedicated experts team is available to help your development.

Technological tracks:
. Silicion, glass, Silicon-On-Insulator (SOI)
. Substrats souples : polyimide, PDMS, parylene etc.
. Piezoelectric materials (bulk and thin films) etc.
. Carbon materials : diamond, graphene, nanotubes etc. 

Standard wafer size : 4-inch (100 mm), capabilities from 2-inch to 8-inch depending on the steps.

Becoming a partner of ESIEE Paris clean rooms means:
. access to high-level technological equipment in a pre-industrial environment, even for very small volumes,
. secure your investments in technological development, - benefit from the expertise of a dedicated team,
. facilitate and accelerate the arrival of your innovations on the market,
. integrate a network of specialized professionals.